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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Mechanical displacement multiplier: 250 μM stable travel range MEMS actuator using frictionless simple compliant structures

[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Mechanical displacement multiplier: 250 μM stable travel range MEMS actuator using frictionless simple compliant structures

Nada, Y.; Medhat, M.; Nagi, M.; Marty, F.; Saadany, B.; Bourouina, T.
  • 作者Nada, Y.; Medhat, M.; Nagi, M.; Marty, F.; Saadany, B.; Bourouina, T.
  • 文件大小920.84KB
  • 发表时间2012
  • DOI10.1109/MEMSYS.2012.6170369
  • 页码1161-1164
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