[IEEE 2012 24th International Conference on Microelectronics (ICM) - Algiers, Algeria (2012.12.16-2012.12.20)] 2012 24th International Conference on Microelectronics (ICM) - Characterization by SEM and FTIR of B-LPCVD polysilicon films after thermal oxidation
Bouzerdoum, Moufida; Birouk, Boubekeur
- 作者Bouzerdoum, Moufida; Birouk, Boubekeur
- 文件大小635.96KB
- 发表时间2012
- DOI10.1109/ICM.2012.6471438
- 页码1-4