Improved Designs for an Electrothermal In-Plane Microactuator

Kwan, Alex Man Ho; Song, Sichao; Lu, Xing; Lu, Lei; Teh, Ying-Khai; Teh, Ying-Fei; Chong, Eddie Wing Cheung; Gao, Yan; Hau, William; Zeng, Fan; Wong, Man; Huang, Chunmei; Taniyama, Akira; Makino, Yoshihide; Nishino, So; Tsuchiya, Toshiyuki; Tabata, Osamu

期刊名称Journal of Microelectromechanical Systems
作者Kwan, Alex Man Ho; Song, Sichao; Lu, Xing; Lu, Lei; Teh, Ying-Khai; Teh, Ying-Fei; Chong, Eddie Wing Cheung; Gao, Yan; Hau, William; Zeng, Fan; Wong, Man; Huang, Chunmei; Taniyama, Akira; Makino, Yoshihide; Nishino, So; Tsuchiya, Toshiyuki; Tabata, Osamu
卷第21卷
期第3期
印刷ISSN1057-7157
电子ISSN1941-0158
文件大小1584.49KB
发表时间2012-06
DOI10.1109/jmems.2012.2185820
页码586-595

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Improved Designs for an Electrothermal In-Plane Microactuator