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$Nanoimprint Mold for 2.5 Tbit/in.$^{2}$ Directed Self-Assembly Bit Patterned Media with Phase Servo Pattern$

Nanoimprint Mold for 2.5 Tbit/in.$^{2}$ Directed Self-Assembly Bit Patterned Media with Phase Servo Pattern

Yamamoto, Ryousuke; Yuzawa, Akiko; Shimada, Takuya; Ootera, Yasuaki; Kamata, Yoshiyuki; Kihara, Naoko; Kikitsu, Akira

期刊名称Japanese Journal of Applied Physics
作者Yamamoto, Ryousuke; Yuzawa, Akiko; Shimada, Takuya; Ootera, Yasuaki; Kamata, Yoshiyuki; Kihara, Naoko; Kikitsu, Akira
卷第51卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小1480.52KB
发表时间2012-3-27
DOI10.1143/JJAP.51.046503

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