Fabrication of SiC Nanopillars by Inductively Coupled SF6/O2 Plasma
- 期刊名称Materials Science Forum
- 作者Choi, Ji Hoon; Latu-Romain, Laurence; Dhalluin, Florian; Chevolleau, Thierry; Salem, Bassem; Baron, Thierry; Chaussende, Didier; Bano, Edwige
- 卷第711卷
- 电子ISSN1662-9752
- 文件大小454.74KB
- 发表时间2012-1
- DOI10.4028/www.scientific.net/msf.711.66
- 页码66-69
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