Hexagonal Faceted SiC Nanopillars Fabricated by Inductively Coupled SF6/O2 Plasma Method
- 期刊名称Materials Science Forum
- 作者Choi, J.H.; Latu-Romain, Laurence; Baron, Thierry; Chevolleau, Thierry; Bano, Edwige
- 电子ISSN1662-9752
- 文件大小366.20KB
- 发表时间2012-5
- DOI10.4028/www.scientific.net/MSF.717-720.893
- 页码893-896
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