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Angular Effects on F
<sup>+</sup>
Etching SiC: MD Study

Angular Effects on F ⁺ Etching SiC: MD Study

Chen, Xu; Tian, Shuping; He, Pingni; Zhao, Chengli; Sun, Weizhong; Zhang, Junyuan; Chen, Feng; Gou, Fujun

期刊名称Plasma Science and Technology
作者Chen, Xu; Tian, Shuping; He, Pingni; Zhao, Chengli; Sun, Weizhong; Zhang, Junyuan; Chen, Feng; Gou, Fujun
卷第14卷
期第12期
印刷ISSN1009-0630
文件大小1105.71KB
发表时间2012-12
DOI10.1088/1009-0630/14/12/12
页码1102-1105

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