The Improvement of Removal Function in Local Wet Etching by Using Eccentric Rotation System
- 期刊名称Key Engineering Materials
- 作者Shen, Xin Min; Dai, Yi Fan; Peng, Wen Qiang; Nagano, Mikinori; Yamamura, Kazuya
- 卷第516卷
- 电子ISSN1662-9795
- 文件大小864.89KB
- 发表时间2012-6
- DOI10.4028/www.scientific.net/KEM.516.504
- 页码504-509
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