A Prototype MEMS Actuator Driven by Magnetic Fluid Enclosed with Polyimide Diaphragms
- 期刊名称Key Engineering Materials
- 作者Okubo, Yuhei; Ota, Hiro; Syoji, Kazuki; Imai, Satomitsu
- 电子ISSN1662-9795
- 文件大小1568.76KB
- 发表时间2012-11
- DOI10.4028/www.scientific.net/KEM.523-524.557
- 页码557-562
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