Fabrication of 5 Tdot/in.2 bit patterned media with servo pattern using directed self-assembly
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Kihara, Naoko; Yamamoto, Ryousuke; Sasao, Norikatsu; Shimada, Takuya; Yuzawa, Akiko; Okino, Takeshi; Ootera, Yasuaki; Kamata, Yoshiyuki; Kikitsu, Akira
- 卷第30卷
- 期第6期
- 印刷ISSN2166-2746
- 文件大小3948.27KB
- 发表时间2012
- DOI10.1116/1.4763356
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