Sidewall-angle dependent mold filling of three-dimensional microcavities in thermal nanoimprint lithography
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Schift, Helmut; Altana, Mirco; Schleunitz, Arne
- 卷第30卷
- 期第6期
- 印刷ISSN2166-2746
- 文件大小2106.19KB
- 发表时间2012
- DOI10.1116/1.4764096
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