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Al and Si doping of sputtered ZnO thin films

Al and Si doping of sputtered ZnO thin films

Schifano, R; Schofield, M; Vines, L; Diplas, S; Monakhov, E V; Svensson, B G

期刊名称IOP Conference Series: Materials Science and Engineering
作者Schifano, R; Schofield, M; Vines, L; Diplas, S; Monakhov, E V; Svensson, B G
卷第34卷
电子ISSN1757-899X
文件大小692.07KB
发表时间2012-04-23
DOI10.1088/1757-899x/34/1/012007

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