SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Current Developments in Lens Design and Optical Engineering XIII - Innovative guided mode method for measuring the penetration depth in partially exposed photo-resist layers
Wood, Thomas; Brissonneau, Vincent; Brückner, Jean-Baptiste; Berginc, Gérard; Flory, François; Le Rouzo, Judikaël; Escoubas, Ludovic; Johnson, R. Barry; Mahajan, Virendra N.; Thibault, Simon
- 作者Wood, Thomas; Brissonneau, Vincent; Brückner, Jean-Baptiste; Berginc, Gérard; Flory, François; Le Rouzo, Judikaël; Escoubas, Ludovic; Johnson, R. Barry; Mahajan, Virendra N.; Thibault, Simon
- 卷第8486卷
- 印刷ISSN0277-786X
- 文件大小527.58KB
- 发表时间2012
- DOI10.1117/12.928692