Effect of PVD process parameters on the quality and reliability of thin (10–30

• 作者Shibesh Dutta; Sivaramakrishnan Ramesh; Balakrishnan Shankar; Sundar Gopalan
• 卷第2卷
• 期第1期
• 印刷ISSN2190-5509
• 电子ISSN2190-5517
• 文件大小354.00KB
• 发表时间2012-03
• DOI10.1007/s13204-011-0033-0
• 页码1-6