Particle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas
Diomede, Paola; Kim, Doosik; Economou, Demetre J.
- 期刊名称AIChE Journal
- 作者Diomede, Paola; Kim, Doosik; Economou, Demetre J.
- 卷第59卷
- 期第9期
- 印刷ISSN0001-1541
- 文件大小770.44KB
- 发表时间2013-09
- DOI10.1002/aic.14053
- 页码3214-3222