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[Advanced Micro and Nanosystems] System-Level Modeling of MEMS (Bechtold/System-Level Modeling of MEMS) || Reduced Order Modeling of MEMS and IC Systems - A Practical Approach

[Advanced Micro and Nanosystems] System-Level Modeling of MEMS (Bechtold/System-Level Modeling of MEMS) || Reduced Order Modeling of MEMS and IC Systems - A Practical Approach

Bechtold, Tamara; Schrag, Gabriele; Feng, Lihong
  • 作者Bechtold, Tamara; Schrag, Gabriele; Feng, Lihong
  • 文件大小455.06KB
  • 发表时间2013
  • DOI10.1002/9783527647132.ch21
  • 页码483-499
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