[Advanced Micro and Nanosystems] System-Level Modeling of MEMS (Bechtold/System-Level Modeling of MEMS) || Reduced Order Modeling of MEMS and IC Systems - A Practical Approach
Bechtold, Tamara; Schrag, Gabriele; Feng, Lihong
- 作者Bechtold, Tamara; Schrag, Gabriele; Feng, Lihong
- 文件大小455.06KB
- 发表时间2013
- DOI10.1002/9783527647132.ch21
- 页码483-499