![[IEEE [1991] GaAs IC Symposium Technical Digest - Monterey, CA, USA (20-23 Oct. 1991)] [1991] GaAs IC Symposium Technical Digest - Magnetron reactive ion etching for GaAs IC manufacturing technology]()
[IEEE [1991] GaAs IC Symposium Technical Digest - Monterey, CA, USA (20-23 Oct. 1991)] [1991] GaAs IC Symposium Technical Digest - Magnetron reactive ion etching for GaAs IC manufacturing technologyNamaroff, M.; Sasserath, J.; Meyyappan, M.; McLane, G.; Lee, H.S.; Cole, M.W. · 1991