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High Temperature Thermal Conductivity of Amorphous Al
<sub/>2</sub>
O
<sub/>3</sub>
Thin Films Grown by Low Temperature ALD

High Temperature Thermal Conductivity of Amorphous Al ₂ O ₃ Thin Films Grown by Low Temperature ALD

Cappella, Andrea; Battaglia, Jean-Luc; Schick, Vincent; Kusiak, Andrzej; Lamperti, Alessio; Wiemer, Claudia; Hay, Bruno

期刊名称Advanced Engineering Materials
作者Cappella, Andrea; Battaglia, Jean-Luc; Schick, Vincent; Kusiak, Andrzej; Lamperti, Alessio; Wiemer, Claudia; Hay, Bruno
卷第15卷
期第11期
印刷ISSN1438-1656
文件大小350.37KB
发表时间2013-11
DOI10.1002/adem.201300132
页码1046-1050

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