A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing
Ping Zhou, Dongming Guo, Renke Kang…
- 作者Ping Zhou, Dongming Guo, Renke Kang…
- 卷第69卷
- 文件大小569.55KB
- 发表时间2013-11
- DOI10.1007/s00170-013-5108-5
- 页码1009-1016