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Development of CVD Ti-containing films

Development of CVD Ti-containing films

Jin, Na; Yang, Yanqing; Luo, Xian; Xia, Zhenhai

期刊名称Progress in Materials Science
作者Jin, Na; Yang, Yanqing; Luo, Xian; Xia, Zhenhai
卷第58卷
期第8期
印刷ISSN0079-6425
文件大小7766.81KB
发表时间2013-10
DOI10.1016/j.pmatsci.2013.07.001
页码1490-1533

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