Ein Bericht ist ein Bericht ist ein Bericht ist ein Bericht.
- 卷第57卷
- 期第3期
- 文件大小483.87KB
- 发表时间2013-03
- DOI10.1365/s12176-013-0760-z
- 页码78-79
[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Presettable micromachined MEMS accelerometersValoff, S.; Kaiser, W.J. · 1999
[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Structured design of integrated MEMSFedder, G.K. · 1999
[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - MEMS based transducers for boundary layer controlKumar, S.M.; Reynolds, W.C.; Kenny, T.W. · 1999
[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Micro heat exchanger by using MEMS impinging jetsWu, S.; Mai, J.; Tai, Y.C.; Ho, C.M. · 1999
[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Digital MicroPropulsionLewis, D.H.; Janson, S.W.; Cohen, R.B.; Antonsson, E.K. · 1999
[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Flip-chip assembly for Si-based RF MEMSHarsh, K.F.; Zhang, W.; Bright, V.M.; Lee, Y.C. · 1999
[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Magnetostatic MEMS relays for the miniaturization of brushless DC motor controllersWright, J.A.; Yu-Chong Tai, · 1999
[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - A practical thermopneumatic valveGrosjean, C.; Xing Yang, ; Yu-Chong Tai, · 1999