Surface electrode configurations for quartz MEMS double-ended tuning fork resonator
- 期刊名称Micro & Nano Letters
- 作者Chai, Yanli; Meng, Guangchan; Chen, Xueying; Liang, Jinxing
- 卷第8卷
- 期第1期
- 电子ISSN1750-0443
- 文件大小422.88KB
- 发表时间2013-01-01
- DOI10.1049/mnl.2012.0621
- 页码52-55
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