Coupling effects of driving frequencies on the electron heating in electronegative capacitive dual-frequency plasmas
- 期刊名称Journal of Physics D: Applied Physics
- 作者Derzsi, A; Donkó, Z; Schulze, J
- 卷第46卷
- 期第48期
- 印刷ISSN0022-3727
- 电子ISSN1361-6463
- 文件大小1287.64KB
- 发表时间2013-12-04
- DOI10.1088/0022-3727/46/48/482001
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