Chemical mechanical polishing: Theory and experiment
- 期刊名称Friction
- 作者Zhao, Dewen; Lu, Xinchun
- 卷第1卷
- 期第4期
- 印刷ISSN2223-7690
- 电子ISSN2223-7704
- 文件大小2142.56KB
- 发表时间2013-12
- DOI10.1007/s40544-013-0035-x
- 页码306-326
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