![[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure]()
[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Scanning micromirror using deformation of a Parylene-Encapsulated Liquid StructureYuta Yoshihata, ; Nguyen Binh-Khiem, ; Atsushi Takei, ; Eiji Iwase, ; Kiyoshi Matsumoto, ; Isao Shimoyama, · 2008