Fabrication and operation of an electrostatic actuator for controlling nanometer-scale gaps in collapsed cantilever heterostructures
- 期刊名称Applied Physics Letters
- 作者Chan, Wing S.; Saarinen, Mika J.; Talghader, Joseph J.
- 卷第102卷
- 期第24期
- 印刷ISSN0003-6951
- 电子ISSN1077-3118
- 文件大小994.73KB
- 发表时间2013-06-17
- DOI10.1063/1.4812185
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