[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - Shaped combs and parametric amplification in inertial MEMS sensors
- 作者Sharma, Mrigank; Sarraf, Elie H; Cretu, Edmond
- 文件大小3268.87KB
- 发表时间2013
- DOI10.1109/ICSENS.2013.6688242
- 页码1-4
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