Extending and Tuning the Travel Range of Microelectromechanical Actuators Using Electrically Reconfigurable Nano-Structured Electrodes
Jain, Ankit; Alam, Muhammad Ashraful
- 期刊名称Journal of Microelectromechanical Systems
- 作者Jain, Ankit; Alam, Muhammad Ashraful
- 卷第22卷
- 期第5期
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小311.71KB
- 发表时间2013-10
- DOI10.1109/jmems.2013.2266614
- 页码1001-1003