Nucleation, Hydroxylation, and Crystallization Effects in ALD SrO
Wang, Han; Jiang, Xiaoqiang; Fu, Kan; Willis, Brian. G.
- 期刊名称The Journal of Physical Chemistry C
- 作者Wang, Han; Jiang, Xiaoqiang; Fu, Kan; Willis, Brian. G.
- 卷第117卷
- 期第22期
- 印刷ISSN1932-7447
- 电子ISSN1932-7455
- 文件大小1584.98KB
- 发表时间2013-06-06
- DOI10.1021/jp3126472
- 页码11578-11583