Three-step growth of metamorphic GaAs on Si(001) by low-pressure metal organic chemical vapor deposition

Wang, Yifan; Wang, Qi; Jia, Zhigang; Li, Xiaoyi; Deng, Can; Ren, Xiaomin; Cai, Shiwei; Huang, Yongqing

期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
作者Wang, Yifan; Wang, Qi; Jia, Zhigang; Li, Xiaoyi; Deng, Can; Ren, Xiaomin; Cai, Shiwei; Huang, Yongqing
卷第31卷
期第5期
印刷ISSN2166-2746
文件大小1376.41KB
发表时间2013
DOI10.1116/1.4820914

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