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[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - SpotMe effective co-optimization of design and defect inspection for fast yield ramp

[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - SpotMe effective co-optimization of design and defect inspection for fast yield ramp

Yan Pan, ; Desineni, Rao; Lambert, Jane; Teoh, Edward; Berndt, Thomas; Lim, Victor; Goh Szu Huat, ; Kim, John; Kekare, Sagar
  • 作者Yan Pan, ; Desineni, Rao; Lambert, Jane; Teoh, Edward; Berndt, Thomas; Lim, Victor; Goh Szu Huat, ; Kim, John; Kekare, Sagar
  • 文件大小1090.61KB
  • 发表时间2013
  • DOI10.1109/asmc.2013.6552805
  • 页码200-205
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