![Pattern Transfer Characterization after Double-Level Lithography for a Fabrication of the Three-Dimensional Aluminum Titanium Carbide Air Bearing Surface of the Hard Disk Slider]()
Pattern Transfer Characterization after Double-Level Lithography for a Fabrication of the Three-Dimensional Aluminum Titanium Carbide Air Bearing Surface of the Hard Disk SliderPholprasit, Patama; Atthi, Nithi; Thammabut, Thawat; Jeamsaksiri, Wutthinan; Hruanun, Charndet; Poyai, Amporn; Silapunt, Rardchawadee · Japanese Journal of Applied Physics · 2012