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[IEEE 2013 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Osaka, Japan (2013.3.25-2013.3.28)] 2013 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Process control monitors for individual single-walled carbon nanotube transistor fabrication processes

[IEEE 2013 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Osaka, Japan (2013.3.25-2013.3.28)] 2013 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Process control monitors for individual single-walled carbon nanotube transistor fabrication processes

Chikkadi, K.; Haluska, M.; Hierold, C.; Roman, C.

作者Chikkadi, K.; Haluska, M.; Hierold, C.; Roman, C.
文件大小2030.76KB
发表时间2013
DOI10.1109/icmts.2013.6528167
页码173-177

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