Novel metal gates for high κ applications

Chang, Mei; Chen, Michael S.; David, Anaïs; Gandikota, Srinivas; Ganguli, Seshadri; Hayden, Brian E.; Hung, Steven; Lu, Xinliang; Mormiche, Claire; Noori, Atif; Smith, Duncan C. A.; Vian, Chris J. B.

期刊名称Journal of Applied Physics
作者Chang, Mei; Chen, Michael S.; David, Anaïs; Gandikota, Srinivas; Ganguli, Seshadri; Hayden, Brian E.; Hung, Steven; Lu, Xinliang; Mormiche, Claire; Noori, Atif; Smith, Duncan C. A.; Vian, Chris J. B.
卷第113卷
期第3期
印刷ISSN0021-8979
文件大小2149.99KB
发表时间2013
DOI10.1063/1.4780447

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Novel metal gates for high κ applications