Thermal pretreatment of sapphire substrates prior to ZnO buffer layer growth

Huang, Shimin; Gu, Shulin; Zhu, Shunming; Gu, Ran; Tang, Kun; Ye, Jiandong; Zhang, Rong; Shi, Yi; Zheng, Youdou

期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
作者Huang, Shimin; Gu, Shulin; Zhu, Shunming; Gu, Ran; Tang, Kun; Ye, Jiandong; Zhang, Rong; Shi, Yi; Zheng, Youdou
卷第31卷
期第5期
印刷ISSN2166-2746
文件大小1920.55KB
发表时间2013
DOI10.1116/1.4817825

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