Insertion effect of the 3-nm-thick Co(Pt) layer on AlN preferred orientation and residual stress in the c-axis textured AlN film
- 期刊名称MRS Proceedings
- 作者Harumoto, Takashi; Muraishi, Shinji; Shi, Ji; Nakamura, Yoshio; Ishiguro, Takashi
- 卷第1515卷
- 电子ISSN1946-4274
- 文件大小18512.78KB
- 发表时间2013-1
- DOI10.1557/opl.2013.390
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