Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
- 期刊名称Journal of Micro/Nanolithography, MEMS, and MOEMS
- 作者Hofmann, Ulrich; Aikio, Mika; Janes, Joachim; Senger, Frank; Stenchly, Vanessa; Hagge, Juergen; Quenzer, Hans-Joachim; Weiss, Manfred; von Wantoch, Thomas; Mallas, Christian; Wagner, Bernhard; Benecke, Wolfgang
- 卷第13卷
- 期第1期
- 印刷ISSN1932-5150
- 文件大小7835.76KB
- 发表时间2013-12-02
- DOI10.1117/1.JMM.13.1.011103
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