Simulation of the polarization effects induced by the bilayer absorber alternating phase-shift mask in conical diffraction
Yang, Liang; Li, Yanqiu; Liu, Ke
- 期刊名称Optical Engineering
- 作者Yang, Liang; Li, Yanqiu; Liu, Ke
- 卷第52卷
- 期第9期
- 印刷ISSN0091-3286
- 文件大小1485.82KB
- 发表时间2013-03-07
- DOI10.1117/1.OE.52.9.091702