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Carrier Gas Dependent Evaporation Energy of GaN Estimated from Spiral Growth Rates in Selective-Area Metalorganic Vapor Phase Epitaxy

Carrier Gas Dependent Evaporation Energy of GaN Estimated from Spiral Growth Rates in Selective-Area Metalorganic Vapor Phase Epitaxy

Akasaka, Tetsuya; Kobayashi, Yasuyuki; Kasu, Makoto; Yamamoto, Hideki
  • 期刊名称Applied Physics Express
  • 作者Akasaka, Tetsuya; Kobayashi, Yasuyuki; Kasu, Makoto; Yamamoto, Hideki
  • 卷第6卷
  • 期第10期
  • 印刷ISSN1882-0778
  • 电子ISSN1882-0786
  • 文件大小1666.36KB
  • 发表时间2013-10-01
  • DOI10.7567/apex.6.105501
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