Fabrication of transferrable, fully suspended silicon photonic crystal nanomembranes exhibiting vivid structural color and high-Q guided resonance
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Lin, Chenxi; Martínez, Luis Javier; Povinelli, Michelle L.
- 卷第31卷
- 期第5期
- 印刷ISSN2166-2746
- 文件大小1911.58KB
- 发表时间2013
- DOI10.1116/1.4819297
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