Type of distortionless through silicon via design based on the multiwalled carbon nanotube
Zhu, Zhangming; Yang, Yintang; Lu, Qijun; Ding, Ruixue
- 期刊名称Micro & Nano Letters
- 作者Zhu, Zhangming; Yang, Yintang; Lu, Qijun; Ding, Ruixue
- 卷第8卷
- 期第12期
- 电子ISSN1750-0443
- 文件大小260.43KB
- 发表时间2013-12-01
- DOI10.1049/mnl.2013.0610
- 页码869-871