Impact of electron scattering in extreme ultraviolet reflective multilayer on electron image
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Iida, Susumu; Amano, Tsuyoshi; Hirano, Ryoichi; Terasawa, Tsuneo; Watanabe, Hidehiro
- 卷第31卷
- 期第6期
- 印刷ISSN2166-2746
- 文件大小2439.70KB
- 发表时间2013
- DOI10.1116/1.4819300
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