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Optical Fourier transform based in-plane vibration characterization for MEMS comb structure

Gao, Yongfeng; Cao, Liangcai; You, Zheng; Zhao, Jiahao; Zhang, Zichen; Yang, Jianzhong

期刊名称Optics Express
作者Gao, Yongfeng; Cao, Liangcai; You, Zheng; Zhao, Jiahao; Zhang, Zichen; Yang, Jianzhong
卷第21卷
期第4期
电子ISSN1094-4087
文件大小1473.05KB
发表时间2013-02-25
DOI10.1364/oe.21.005063