Post-fabrication trimming of athermal silicon waveguides
- 作者S. Grillanda; V. Raghunathan; V. Singh; F. Morichetti; J. Michel; L. Kimerling; A. Melloni; A. Agarwal
- 文件大小521.83KB
- 发表时间2013
- DOI10.1364/OL.38.005450
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