SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Mueller matrix characterization using spectral reflectometry
Shafir, Dror; Barak, Gilad; Yachini, Michal H.; Sendelbach, Matthew; Bozdog, Cornel; Wolfling, Shay; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.
- 作者Shafir, Dror; Barak, Gilad; Yachini, Michal H.; Sendelbach, Matthew; Bozdog, Cornel; Wolfling, Shay; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.
- 卷第8789卷
- 印刷ISSN0277-786X
- 文件大小560.03KB
- 发表时间2013
- DOI10.1117/12.2022549