Characterization of “Bulk Lithography” Process for Fabrication of Three-Dimensional Microstructures
- 期刊名称Journal of Micro and Nano-Manufacturing
- 作者Gandhi, Prasanna; Bhole, Kiran
- 卷第1卷
- 期第4期
- 印刷ISSN2166-0468
- 文件大小1404.25KB
- 发表时间2013-10-10
- DOI10.1115/1.4025461
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