SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Alternative methods for uncertainty evaluation in EUV scatterometry
Heidenreich, Sebastian; Henn, Mark-Alexander; Gross, Hermann; Bodermann, Bernd; Bär, Markus; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.
- 作者Heidenreich, Sebastian; Henn, Mark-Alexander; Gross, Hermann; Bodermann, Bernd; Bär, Markus; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M.
- 卷第8789卷
- 印刷ISSN0277-786X
- 文件大小560.49KB
- 发表时间2013
- DOI10.1117/12.2020677