SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Dimensional Optical Metrology and Inspection for Practical Applications II - The diffractive optics calibrator: design and construction
Cai, Wenrui; Zhou, Ping; Zhao, Chunyu; Burge, James H.; Harding, Kevin G.; Huang, Peisen S.; Yoshizawa, Toru
- 作者Cai, Wenrui; Zhou, Ping; Zhao, Chunyu; Burge, James H.; Harding, Kevin G.; Huang, Peisen S.; Yoshizawa, Toru
- 卷第8839卷
- 印刷ISSN0277-786X
- 文件大小682.62KB
- 发表时间2013
- DOI10.1117/12.2023524