Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers
- 期刊名称Nano Convergence
- 作者Schleunitz, Arne; Guzenko, Vitaliy A; Messerschmidt, Martin; Atasoy, Hakan; Kirchner, Robert; Schift, Helmut
- 卷第1卷
- 期第1期
- 电子ISSN2196-5404
- 文件大小2679.34KB
- 发表时间2014-12
- DOI10.1186/s40580-014-0007-5
- 页码7-1543
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