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Thin film characterization of zinc tin oxide deposited by thermal atomic layer deposition

Mullings, Marja N.; Hägglund, Carl; Tanskanen, Jukka T.; Yee, Yesheng; Geyer, Scott; Bent, Stacey F.

期刊名称Thin Solid Films
作者Mullings, Marja N.; Hägglund, Carl; Tanskanen, Jukka T.; Yee, Yesheng; Geyer, Scott; Bent, Stacey F.
卷第556卷
印刷ISSN0040-6090
文件大小1802.54KB
发表时间2014-04
DOI10.1016/j.tsf.2014.01.068
页码186-194